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- CTI
- Motor Repair Kit
Product Details
Product Introduction
M22 Motor Repair Kit CHECK LIST
P/N: CM100HK20 |
| Item |
Description |
Hualientech P/N |
QTY |
| 1 |
M22 1st Displacer Seal (Y) |
CM100HP02 |
1 |
| 2 |
M22 2nd Displacer Seal (Y) |
CM100HP03 |
1 |
| 3 |
M22 Bushing long |
CM100HP04 |
1 |
| 4 |
M22 Bushing short |
CM100HP05 |
1 |
| 5 |
Drive Bearing R-3ZZ |
CM100HP07 |
1 |
| 6 |
Cam Bearing |
CM100HP08 |
1 |
| 7 |
Front Motor Bearing R6-2RS |
CM100HP09 |
1 |
| 8 |
Rear Motor Bearing 6200RS |
CM008HP25 |
1 |
| 9 |
Seal Assy, Yoke |
CM100HP10 |
1 |
| 10 |
Seal Assy, Inlet Valve |
CM100HP11 |
1 |
| 11 |
Key, Motor shaft |
CM100HP12 |
1 |
| 12 |
Flat Washer |
CM100HP13 |
4ea/1set |
| 13 |
M22 Retaining Ring |
CM100HP14 |
1 |
| 14 |
M22 Compression Spring&Valve Spring |
CM100HP15 |
4ea/1set |
| 15 |
M22 Exhaust Valve Body |
CM100HP16 |
1 |
| 16 |
M22 Inlet Valve Body |
CM100HP17 |
1 |
| 17 |
Inlet End Cap |
CM100HP18 |
1 |
| 18 |
O-Ring Gland (AS010) |
CM101HP2N |
2ea/1set |
| 19 |
O-Ring Gland (AS011) |
CM011HP1N |
1 |
| 20 |
O-Ring Gland (AS013) |
CM013HP2N |
2ea/1set |
| 21 |
O-Ring Gland (AS020) |
CM020HP1V |
1 |
| 22 |
O-Ring Gland (AS033) |
CM033HP1N |
1 |
| 23 |
O-Ring Gland (AS037) |
CM037HP1N |
1 |
| 24 |
O-Ring Gland (AS042) |
CM042HP1N |
1 |
| 25 |
O-Ring Gland (AS904) |
CM904HP1N |
1 |
| 26 |
O-Ring Gland (AS218) |
CM218HP1N |
1 |
| 27 |
O-Ring Gland (AS213) |
CM213HP1V |
1 |
| 28 |
O-Ring Gland (AS116) |
CM116HP1V |
1 |
Applying to Cryo Torr-100 Cryopump or On Board-100 Cryopump.
Product Notes
▲If there are any questions and inquiries, please feel free to contact us.